Semiconductor Lithography Equipment

Press Releases

Canon Meets Growing Demand for Internet-of-Things Support with New 200mm Wafer Option for I-Line, KrF Semiconductor Lithography Equipment

MELVILLE, N.Y., Dec. 21, 2017 /PRNewswire/ — Canon U.S.A., Inc., a leader in digital imaging solutions, today announced that its parent company, Canon Inc., has begun sales of a 200 millimeter (mm) option for the company’s FPA-5550iZ2 i-line1 and the FPA-6300ES6a KrF2 semiconductor lithography equipment, released in December 2016 and April 2012 respectively. These two systems are renowned for their capability to mass-produce logic, memory and image sensor devices…