Semiconductor Lithography System

Press Releases

Canon Commences Sales of the FPA-5520iV LF Option for Back-End Process Semiconductor Lithography Systems

Canon U.S.A., Inc., a leader in digital imaging solutions, today announced that its parent company, Canon Inc., has launched the FPA-5520iV LF Option for back-end process semiconductor lithography systems. This device features an i-line stepper1 with a 1.5 micrometer2 resolution and a wide exposure field of 52 mm x 68 mm for advanced packaging3. Canon Commences Sales of the FPA-5520iV LF Option for Back-End Process…